| 摘要 |
PROBLEM TO BE SOLVED: To provide an observation device capable of adjusting the illumination state of a sample in accordance with the shape of the sample and accurately performing the inspection and the measurement of the sample. SOLUTION: In this observation device equipped with an illumination optical system to irradiate a sample surface with light from a light source J and an observation optical system to form the image of the sample surface, a detection system to detect the light intensity distribution of the pupil surface 9 of the objective lens 5 of the observation optical system is adopted, and an aperture diaphragm 3 is moved so that the detected light intensity distribution of the pupil surface 9 may be nearly uniformly changed radially with the optical axis L2 of the observation optical system as center. Thus, the telecentricity of the illumination optical system or the observation optical system is secured and the illumination state suitable for the inspection and the measurement is realized.
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