| 摘要 |
PURPOSE: A lifter of a FOUP opener is provided to prevent generation of particles by installing a protective cover on a belt and using a transferring device of a ball screw method. CONSTITUTION: A driving belt and a driving device are installed in the inside of a lift frame(310). A plurality of driving pulleys(322,322a) are fixed to an upper and a lower portion of the lift frame(310). A driving motor is connected with the driving pulley(322). The driving belt is wound around the driving pulleys(322,322a). A transferring section(330) is fixed to a predetermined portion of the driving belt. The transferring section(330) has a support fixing portion projected to one side of the lift frame(310). A support is fixed to the support fixing portion. A guide groove is formed at the inside of the transferring section(330). A guide rail is combined with the guide groove. A ball as a buffering member is located between the guide rail and the guide groove. A plurality of adhesive sections are fixed to an opening portion of the lead frame(310). A shielding plate(350) is adhered on the adhesive sections in order to shield the opening portion of the lead frame(310). The adhesive sections are formed with permanent magnets. A plurality of guide rollers are formed in the inside of the support fixing portion.
|
