Control system, for a vacuum deposition assembly, has a computer-controlled deflection module for the electron beam to set the beam sweep movements for a consistent coating of the whole substrate surface

摘要

The control system for the sweep movement of an electron beam (14), in a vacuum deposition assembly (1), has a deflection module (23,27) which is operated according to selected functions. The electron beam is moved in two co-ordinate directions. At least one of the selected functions is a term with time changes which varies the periodicity of the electron beam sweep and its co-ordinate direction. The term can be set manually or automatically. The assembly is operated by a control unit (7). The basic beam deflection is at a frequency of 4-150 Hz with a wobbling frequency of 50-500 Hz.