发明名称 THIN FILM CAPACITOR,AND ELECTRONIC CIRCUIT COMPONENT
摘要 <p>A thin film capacitor comprising a lower electrode formed on a predetermined surface,a dielectric layer formed of a dielectric material and formed on the lower electrode,and an upper electrode formed on the dielectric layer,characterized I that the end part of the lower electrode is covered by an insulator other than the dielectric layer.</p>
申请公布号 WO03007320(A1) 申请公布日期 2003.01.23
申请号 WO2002JP07089 申请日期 2002.07.12
申请人 HITACHI, LTD.;OGINO, MASAHIKO;SATOH, TOSHIYA;MIWA, TAKAO;NABATAME, TOSHIHIDE;AMOU, SATORU 发明人 OGINO, MASAHIKO;SATOH, TOSHIYA;MIWA, TAKAO;NABATAME, TOSHIHIDE;AMOU, SATORU
分类号 H01L23/498;H01L23/64;H01L27/08;H05K1/16;(IPC1-7):H01G4/33 主分类号 H01L23/498
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