BAKE PLATE OF SILICON MATERIAL AND THERMAL CONTROLLER USING THE SAME

摘要

PURPOSE: A bake plate of a silicon material and a thermal controller using the same are provided to control uniformly temperature of the bake plate by measuring temperature in cells units on a bake plate and controlling temperature of each cell of the bake plate according to the measured temperature. CONSTITUTION: A bake plate(100) is formed with a silicon material. The bake plate(100) includes a plurality of integrated cells(110). The cells(110) include a switching transistor for applying or cutting off current, a resistor connected with the transistor, and a thermal sensor for measuring temperature of the cell(110), respectively. The cells(110) of the bake plate(100) are heated by the resistor if the electric power is applied to the transistor. The IC(Integrated Circuit) can be formed by using a photo etch method of a semiconductor fabrication process.