METHOD AND APPARATUS FOR CONTROLLING DIAMETER OF A SILICON CRYSTAL IN A GROWTH PROCESS,申请号EP20000915791-传众专利搜索

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发明名称	METHOD AND APPARATUS FOR CONTROLLING DIAMETER OF A SILICON CRYSTAL IN A GROWTH PROCESS
摘要
申请公布号	EP1171652(B1)	申请公布日期	2003.01.22
申请号	EP20000915791	申请日期	2000.02.17
申请人	MEMC ELECTRONIC MATERIALS, INC.	发明人	FUERHOFF, ROBERT, H.;KIMBEL, STEVEN, L.
分类号	C30B15/20;C30B15/22;C30B29/06;(IPC1-7):C30B15/20	主分类号	C30B15/20
代理机构		代理人
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