| 摘要 |
<p>A vacuum pumping system comprises a vacuum pumping arrangement comprising: a drive shaft; a motor for driving said drive shaft; a molecular pumping mechanism comprising a turbomolecular pumping mechanism; and a backing pumping mechanism. The drive shaft drives said molecular pumping mechanism and said backing pumping mechanism. The system also comprises an evacuation mechanism, such as a load lock pump, for evacuating at least, said turbomolecular pumping mechanism.</p> |
