发明名称 SCHOTTKY ELECTRON GUN AND ELECTRON BEAM DEVICE
摘要 PROBLEM TO BE SOLVED: To facilitate the manufacture of a high-tension cable used for an electron beam device mounted with an SE electron gun. SOLUTION: A Schottky electron gun body is provided with a monocrystal chip 1 for emitting electrons, a filament 2 for heating the chip 1, an extraction electrode 7 for supplying the electric field for extracting the electrons from the chip 1, and a suppressor electrode 6 for suppressing electrons generated from the filament 2. The Schottky electron gun body is provided with a battery 15 for applying negative voltage to the suppressor electrode 6.
申请公布号 JP2003016987(A) 申请公布日期 2003.01.17
申请号 JP20010193115 申请日期 2001.06.26
申请人 HITACHI LTD 发明人 WATANABE SHUNICHI;FUKUHARA SATORU;MYOCHIN KENICHI
分类号 G03F7/20;H01J37/073;H01J37/248;H01L21/027;(IPC1-7):H01J37/248 主分类号 G03F7/20
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