| 摘要 |
Generally, a method and apparatus for processing whole wafers comprising is provided. In one embodiment, an apparatus for processing whole wafers includes a cassette, a plurality of flowcells disposed on the cassette, a fluidics station having at least one pump, at least one fluid source in communication with the pump and a cradle for receiving the cassette when coupled to the fluidic station. The flowcells generally are adapted to retain at least one whole wafer and include an inlet port and an outlet port. The pump of the fluidic station is coupled to one or more inlet ports of the flowcells disposed in the cassette. The apparatus enables multiple whole wafers to be simultaneously processed while providing flexibility of accommodate different configurations of flowcells.
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