METHOD FOR MANUFACTURING SURFACE ACOUSTIC WAVE DEVICE
摘要
A method for manufacturing a surface acoustic wave device comprising a first conductive pattern and a second conductive pattern having different thicknesses on the same piezoelectric substrate. The surface acoustic wave device having a plurality of electrode films with different thicknesses on the same piezoelectric substrate is manufactured with excellent accuracy by combining a plurality of steps of forming metal films and an etching step.
申请公布号
WO03005577(A1)
申请公布日期
2003.01.16
申请号
WO2002JP06550
申请日期
2002.07.01
申请人
MATSUSHITA ELECTRIC INDUSTRIAL CO., LTD.;YAMASHITA, KIYOHARU;IKEDA, KAZUO;SEKI, SHUNICHI;FURUKAWA, MITSUHIRO