发明名称 METHOD FOR MANUFACTURING SURFACE ACOUSTIC WAVE DEVICE
摘要 A method for manufacturing a surface acoustic wave device comprising a first conductive pattern and a second conductive pattern having different thicknesses on the same piezoelectric substrate. The surface acoustic wave device having a plurality of electrode films with different thicknesses on the same piezoelectric substrate is manufactured with excellent accuracy by combining a plurality of steps of forming metal films and an etching step.
申请公布号 WO03005577(A1) 申请公布日期 2003.01.16
申请号 WO2002JP06550 申请日期 2002.07.01
申请人 MATSUSHITA ELECTRIC INDUSTRIAL CO., LTD.;YAMASHITA, KIYOHARU;IKEDA, KAZUO;SEKI, SHUNICHI;FURUKAWA, MITSUHIRO 发明人 YAMASHITA, KIYOHARU;IKEDA, KAZUO;SEKI, SHUNICHI;FURUKAWA, MITSUHIRO
分类号 H03H3/08;H03H9/145;(IPC1-7):H03H3/08;G01B21/08 主分类号 H03H3/08
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