发明名称 METHOD OF JOINING COMPONENTS
摘要 A method of combining components to form an integrated device, wherein the components are provided on a first sacrificial wafer, and a second non-sacrificial wafer, respectively. The sacrificial wafer carries a first plurality of components and the non-sacrificial wafer carries a second plurality of components. The wafers are bonded together with an intermediate bonding material. Optionally the sacrificial wafer is thinned to a desired level. The components of the sacrificial wafer are electrically interconnected to the component(s) on the non-sacrificial wafer. Finally, optionally the intermediate bonding material is stripped away.
申请公布号 EP1275146(A1) 申请公布日期 2003.01.15
申请号 EP20010942791 申请日期 2001.01.17
申请人 KAELVESTEN, EDOUARD;STEMME, GOERAN;NIKLAUS, FRANK 发明人 KAELVESTEN, EDOUARD;STEMME, GOERAN;NJKLAUS, FRANK
分类号 G01J1/02;H01L21/70;G01J5/02;H01L21/20;H01L21/60;H01L21/68;H01L21/683;H01L21/98;H01L25/16;H01L27/14;H01L37/00 主分类号 G01J1/02
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