METHOD FOR MANUFACTURING STAMPER FOR OPTICAL DISK AND METHOD FOR MANUFACTURING OPTICAL DISK

摘要

PROBLEM TO BE SOLVED: To provide a method for manufacturing a stamper for optical disks having a long service life in forming of optical disks and capable of manufacturing high quality optical disks which produce little noise in reproduction and to provide a method for manufacturing optical disks with the stamper. SOLUTION: A photoresist layer is formed on the etching layer of a substrate obtained by forming a metallic layer on a base layer and immediately forming the etching layer on the metallic layer and consisting of the base layer, metallic layer and etching layer, the photoresist layer is exposed by irradiation with a laser beam and developed, the etching layer is etched through photoresist protrusions formed by the development as a mask to form signal protrusions of the etching material of the etching layer corresponding to the photoresist protrusions on the base layer and the photoresist protrusions are removed to manufacture the objective stamper.