| 摘要 |
PROBLEM TO BE SOLVED: To provide a small installation space substrate-cleaning apparatus, capable of being made small sized with easy maintenance of replacement, cleaning, and the like of its component and the like. SOLUTION: An upper stage cleaning unit 10 and a lower stage cleaning unit 50 are arranged in the upper and lower two stages, the upper stage cleaning unit 10 comprises a substrate-holding mechanism 11 and a driving mechanism 12, the lower stage cleaning unit 50 comprises a substrate-holding mechanism 52 and a driving mechanism 53, and the upper stage cleaning unit 10 can be flipped upward via a hinge 51. |
