| 摘要 |
PROBLEM TO BE SOLVED: To provide an electrostatic actuator wherein friction between a stator and a mover is reduced and thus the driving efficiency is enhanced. SOLUTION: A group 23 of electrodes for driving and a group 24 of electrodes for holding are formed on a stator 20. An electrode 33 for being driven placed opposite to the group 23 of the electrodes for driving, and an electrode 34a for being held placed opposite to the group 24 of the electrodes for holding, are formed on a first mover 30. An electrode 43 for being driven placed opposite to the group 23 of the electrodes for driving, and an electrode 44a for being held placed opposite to the group 24 of the electrodes for holding, are formed on a second mover 40. The electrostatic actuator is provided with a power supply portion 26 which supplies drive power to the electrodes for driving, a power supply portion 26 which selectively supplies power for holding to the group 24 of the electrodes for holding, the stator 20, and a rib 25 which supports the first and second movers 30 and 40 in the direction C of optical axis by line contact.
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