METHOD AND SYSTEM FOR MANUFACTURING DEPOSITED FILM

摘要

PROBLEM TO BE SOLVED: To provide a method and a system for manufacturing a photoreceptive member free from fusion even in a high-speed process and causing neither striped erosion nor striped irregularity. SOLUTION: A high-frequency power generator 104 which is common to all reactor vessels 101 supplies pulse-modulated high-frequency power to the reactor vessels 101 via high-frequency a matching box 103. Power supply paths 102 distribute the high-frequency power which is supplied from the high-frequency power generator 104 via the high-frequency matching box 103 to the respective reactor vessels 101. Each of the plurality of reactor vessels 101 has an exhaust means and a source-gas feed means and is supplied with the high-frequency powder and deposits a non-single-crystal carbon film containing at least hydrogen and/or halogen atoms.