| 发明名称 |
ANTISTATIC METHOD IN SURFACE ANALYSIS |
| 摘要 |
<p>PROBLEM TO BE SOLVED: To perform accurate Auger spectroscopic analysis in the surface analysis of a sample with an insulating surface. SOLUTION: A conductive film is formed in the sample surface, and the conductive film is etched with the conductive film covered with a conductive sheet with a mesh-shaped opening part.</p> |
| 申请公布号 |
JP2003004675(A) |
申请公布日期 |
2003.01.08 |
| 申请号 |
JP20010191101 |
申请日期 |
2001.06.25 |
| 申请人 |
SHARP CORP |
发明人 |
HATA NAOKO;FUJIWARA NORIHITO |
| 分类号 |
G01N23/225;G01N23/227;H01J37/20;H01J37/252;(IPC1-7):G01N23/225 |
主分类号 |
G01N23/225 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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