METHOD FOR CONTROLLING TEMPERATURE IN BAKE EQUIPMENT

摘要

PURPOSE: A method for controlling temperature in a bake equipment is provided to maximize productivity of the bake equipment by minimizing a standby time for baking substrates of two or more kinds. CONSTITUTION: A CPU(Central Processing Unit) determines whether internal temperature of a chamber unit is changed or not(S10). The CPU compares the changed internal temperature with the current temperature of the chamber unit(S20). The internal temperature of the CPU is changed by a heating unit(S30). The CPU determines the first internal temperature difference between bake temperature of the first substrate and the bake temperature of the second substrates(S40). A cooling process is performed by the CPU(S50). The CPU checks the second internal temperature difference of the chamber unit(S60). The cooling process is performed according to the second internal temperature difference(S70). A bake process for the second substrate is performed(S80).