发明名称 Method of forming a color filter
摘要 The present invention provides a method for increasing the adhesion of a color filter on a semiconductor wafer. The semiconductor wafer comprises a substrate, a plurality of MOS transistor sensors positioned on the substrate, and a plurality of insulators formed between two MOS transistor sensors on the substrate. The present invention first involves forming a dielectric layer on the semiconductor wafer, which covers each MOS transistor sensor and each insulator. Thereafter, a passivation layer is formed on the dielectric layer, and a plurality of recesses is formed in the passivation layer corresponding to a MOS transistor sensor. Finally, a color filter is formed in each recess. The recess is used to increase the contact areas between the color filter and the passivation layer so as to prevent stripping of the color filter.
申请公布号 US2002197753(A1) 申请公布日期 2002.12.26
申请号 US20010885047 申请日期 2001.06.21
申请人 YEH CHENG-PANG;CHEN CHING-CHUNG 发明人 YEH CHENG-PANG;CHEN CHING-CHUNG
分类号 H01L21/00;H01L31/18;(IPC1-7):H01L21/00 主分类号 H01L21/00
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