| 摘要 |
<p>PROBLEM TO BE SOLVED: To improve the efficiency of available light and to attain high-speed scanning by using a cylindrical microlens plate and a slit plate as a scanning means. SOLUTION: A returned light beam such as a reflected light beam from a sample 17 is again made incident on a slit plate 15 through an objective lens 16, light beams passing through the respective slits on the slit plate 15 are reflected by a beam splitter 14 and made incident on a photodetector 19 through a lens 18. The cylindrical microlens plate 13 and the slit plate 15 are fixed to the same shaft and rotated synchronously by a motor mounted on the shaft. An illuminating light beam 101 converged by a spiral lens is passed through a spiral slit of the same shape formed on the slit plate and returned as a reflected light beam. An extended reflected light beam from a surface other than the focal plane of the objective lens 16 is shielded by the slit plate 15 and confocal effect is generated. When a ratio of a slit width to a slit pitch is 1:10, the area of the sample 17 becomes ten times.</p> |
