MULTICOMPONENT THIN FILM AND ITS FORMATION METHOD

摘要

PROBLEM TO BE SOLVED: To provide a multicomponent thin film and its formation method. SOLUTION: Although a unit substance layer for composing a thin film to be formed on a substrate is formed after the substrate is loaded into a reaction chamber, the unit substance layer is formed through a first stage that is formed by a mosaic atom layer composed of two types of precursors including a substance constituent for at least composing the thin film, a second stage for purging the inside of the reaction chamber, and a third stage for chemically changing the mosaic atom layer.