METHOD AND SYSTEM FOR HIGH PRESSURE TREATMENT

摘要

PROBLEM TO BE SOLVED: To obtain a high pressure treatment method in which the pressure in a high pressure processing chamber can be reduced or boosted quickly. SOLUTION: The high pressure treatment method for removing unwanted substances on a workpiece by touching the article to a high pressure fluid and one kind or more of chemical other than the high pressure fluid under pressure in a high pressure processing chamber comprises a process for supplying a high pressure fluid containing no chemical to the high pressure processing chamber following to the high pressure treatment and replacing a mixture fluid containing unwanted substances and/or a chemical in the high pressure treatment chamber by a clean high pressure fluid containing no unnecessary substances and/or chemical. The replacing process is performed at a higher temperature than the high pressure treatment process.