| 摘要 |
<p>A method for scribing a fragile substrate, comprising the steps of heating a glass substrate (50) by continuously radiating a laser spot on the surface of the glass substrate (50) along an area in which a scribe line is formed at a temperature lower than the softening point of the glass substrate and, at the same time, continuously cooling the area near the laser spot by the cooling water injected from a cooling nozzle (37), whereby blind crack can be formed along the predicted scribe line. An imaging mechanism (40) images a blind crack forming area in proximity to an area on the surface of the glass substrate in which the cooling water is injected, and checks that the blind crack is formed based on the imaged image data.</p> |
