发明名称 DYNAMIC MANIPULATION METHOD FOR MODULE POSITION IN OPTICAL SYSTEM
摘要 PROBLEM TO BE SOLVED: To provide a dynamic manipulation and adjusting method for a module or component in an optical system. SOLUTION: Module or component, for example a lens, of the optical system is shifted by at least two actuators having sensors to decide the relative path displacement, and the position of the component is decided by at least two sensors, and these actuators and sensors make communication via a control loop. A mechanical impulse is given to the component by the actuators, where the timing is changed any as desired. The movement of each actuator is executed by a temporally varying velocity profile ordered as a function of the position (Sn <actual> ) decided concerning the set position (Ssetpoint ) of the component, and thereafter the position (Sn <actual> ) is redecided. This cycle of steps is repeated until the component 2 reaches the desired position (Ssetpoint ).
申请公布号 JP2002361598(A) 申请公布日期 2002.12.18
申请号 JP20010351023 申请日期 2001.11.16
申请人 CARL-ZEISS-STIFTUNG TRADING AS CARL ZEISS 发明人 AUBELE KARL-EUGEN
分类号 B81B7/00;B81C99/00;G02B7/02;G02B7/08;G03F7/20;G05D3/12;H01L21/027;(IPC1-7):B81C5/00 主分类号 B81B7/00
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