| 摘要 |
PROBLEM TO BE SOLVED: To provide an etching agent for smoothening the surface of copper under a mild condition, and to provide an etching method for smoothening the surface. SOLUTION: The etching agent for copper or a copper alloy consists of an aqueous solution containing hydroxylamine keeping the solution alkaline, and suppressing the decomposition of an oxidizer, an oxidizer for oxidizing copper, and accelerating its dissolution into the solution, ammonium salt feeding ammonia ions into the solution, and accelerating the dissolution of copper, and an azole compound suppressing the dissolution of copper in the vertical direction, and accelerating the dissolution of copper in the horizontal direction.
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