| 摘要 |
PROBLEM TO BE SOLVED: To provide a suction table capable of accurately sucking an object to be treated. SOLUTION: Overlap parts (parts surrounded by two-dot chain lines), in which several adjacent spot facings 33 and 39 are partially overlapped with each other, form each air discharge passage 60 for communicating each suction hole 25 with each other. With this structure, partitioning can be subdivided to reduce a difference of the suction force to be applied to the object to be treated between parts of the suction table near a part communicated with the air discharge means and residual range, and the suction force can be equalized. Pillar parts (shared area) in the other surface of a first plate member except for several spot facings 33 and 39 abut on a second plate member to accuracy secure the flatness of a loading surface.
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