PREPARATION METHOD OF ORGANIC SILICATE POLYMER AND PREPARATION METHOD OF INSULATION LAYER USING THE METHOD

摘要

PURPOSE: A method for preparing an organic silicate polymer, a composition for forming the insulation layer, a method for preparing an insulation layer using the composition and a semiconductor device containing the insulation layer are provided, to improve the heat stability, the coating formability, the mechanical strength and the cracking resistance of the polymer and the insulating property, the uniformity, the dielectric characteristic, the cracking resistance and the surface strength of the coating layer prepared using by the polymer. CONSTITUTION: The preparation method of an organic silicate polymer comprises reacting the organometal silane compound represented by R1pR2(3-p)SiR3MX, or a mixture of the organometal silane compound, and a silane compound or a silane oligomer, by Grinard reaction, to prepare a carbon-bridged silane oligomer and removing the by-product metal compound; and mixing the carbon-bridged silane oligomer, and a silane compound or a silane oligomer in an organic solvent, and adding water and a catalyst to the mixture to prepare an organic silicate polymer by hydrolysis and condensation. In the formula, R1 is H, an aryl group, an alkyl group, or a linear or branched alkyl group of C1-C4 substituted or unsubstituted with fluorine; R2 is Cl, an acetoxy or hydroxy group or a linear or branched alkoxy group of C1-C4; R3 is an alkylene group of C1-C6; M is Mg, Hg or Cu; X is a halogen atom; and p is an integer of 0-2. The composition comprises the organic silicate polymer prepared by the method; and an organic solvent.