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发明名称
摘要
申请公布号
JP2002543283(A)
申请公布日期
2002.12.17
申请号
JP20000613854
申请日期
2000.04.26
申请人
发明人
分类号
C23C16/34;H01L21/28;H01L21/285;H01L21/768;(IPC1-7):C23C16/34
主分类号
C23C16/34
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