APPARATUS FOR DETECTING POSITION OF WAFER AND DETECTION METHOD USING THE SAME

摘要

PURPOSE: An apparatus for detecting the position of a wafer is provided to adjust the position of a sensor module, by making a sensor hole have a diameter larger than that of a coupling screw wherein the sensor hole couples the sensor module and a shuttle by using the coupling screw. CONSTITUTION: A blade in which a wafer is settled is mounted on the shuttle. The sensor module(102) senses whether the wafer is precisely settled, installed on the right and left sides of the blade. The sensor hole(202) couples the sensor module and the shuttle by using the coupling screw. The diameter of the sensor hole is larger than that of the coupling screw.