| 摘要 |
<p>PROBLEM TO BE SOLVED: To accurately detect an optical intensity distribution in a measuring apparatus for detecting the optical intensity distribution of a section of a reflected light from a surface to be measured by introducing an optical beam as a parallel luminous flux having a large sectional area to the surface to be measured. SOLUTION: The measuring apparatus comprises a sensor for detecting the optical intensity distribution of the optical beam L totally reflected on an interface 11a of a metal film on a dielectric prism 11 by introducing the optical beam L as the parallel luminous flux having a sufficient sectional area at an angle for obtaining totally reflecting conditions on the interface 11a of the metal film in such a manner that the optical beam distribution of the section is visually imaged by a screen arranged in an optical path of the beam L reflected on the interface 11a, once diffused, and then focused on a CCD linear sensor 8 via a focusing optical system 7.</p> |
