PRESSURE SENSOR AND MANUFACTURING METHOD THEREFOR

摘要

PROBLEM TO BE SOLVED: To enhance the withstand voltage of a liquid sealed type pressure sensor. SOLUTION: A pressure detecting element 10 comprises a hermetic glass 13 hermetically fixed to the central opening 12 of a metallic element housing 11, where a lead pin 14 to lead the electronic signal from a sensor chip 17 to an outside and a glass member 16 for sensor chip mounting retaining the sensor chip 17 are placed. A metal diaphragm 20 is fixed to the opening edge at the upper part of the housing 11 and then forms the liquid seal type pressure sensor. The central opening 12 of the housing 11 is formed, with the inside diameter at the side where the lead pin 14 is led out being larger than the inside diameter of the metal diaphragm and the insulation distance between the lead pin 14 and the housing is made large.