| 摘要 |
PURPOSE: A device for rinsing an organic material is provided to monitor a gap between a quartz window and a substrate in real time by a gap sensor for preventing the excessive lifting of a stage by a stopper. CONSTITUTION: A device for rinsing an organic material includes a UV lamp generating UV light, a quartz window for transmitting the UV light to a substrate, a stage for supporting the substrate, a sensor mounted on the stage for sensing a gap between the substrate and the quartz window and formed of at least more than two inductors apart from each other by a predetermined magnetic space and a sensor bar for moving in the magnetic space vertically, a stopper element mounted on the stage to contact the sensor by the lifting motion of the stage, a gap calculating element(43) for generating a gap data by the gap sensing signal, a display element(42) for displaying the gap, a control element(41) for supplying the gap data of the gap calculating element to the display element, a stage driving part(46) for lifting or lowering the stage under the control of the control element, and a lamp driving part(47) for illuminating the UV lamp under the control of the control element. |
