发明名称 |
Method for fabricating integrated micro spherical lens for optical fiber switch and the device made therefrom |
摘要 |
The present invention provides a fabrication process for making an integrated micro spherical lens for an optical switch. Through a semiconductor micro imaging process and a wet-etching process of micro electromechanical working, a plurality of V-shape grooves and mesas are formed on the surface of a base. A further micro imaging process, an etching process and a heat tempering process are used to form a micro spherical lens on the mesa, so that an integrated micro spherical lens and fiber array can be precisely arranged.
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申请公布号 |
US2002186923(A1) |
申请公布日期 |
2002.12.12 |
申请号 |
US20010878396 |
申请日期 |
2001.06.12 |
申请人 |
LIN YNH-SHENG;CHAO YU-HSI;PAN CHENG-TANG;LIN KUN-LUNG |
发明人 |
LIN YNH-SHENG;CHAO YU-HSI;PAN CHENG-TANG;LIN KUN-LUNG |
分类号 |
G02B6/12;G02B6/32;G02B6/35;(IPC1-7):G02B6/32 |
主分类号 |
G02B6/12 |
代理机构 |
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代理人 |
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地址 |
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