Electrode structure of piezoelectric vibrator

摘要

To provide a piezoelectric vibrator having an electrode structure capable of bonding a large area, on a quartz wafer formed with a plurality of vibrators each comprising a quartz vibrator piece and a frame, there are formed electrode patterns each including a pair of excitation electrode films on the respective quartz vibrator piece and bond films formed on the respective frame and connected to the pair of excitation electrode films and the electrode patterns are connected to each other by sputter films for shortcircuiting constituting metal films.