发明名称 SEMICONDUCTOR WAFER PROCESSING TO INCREASE THE USABLE PLANAR SURFACE AREA
摘要 The invention provides a method for increasing the usable surface area of a semiconductor wafer having a substantially planar surface and a thickness dimension at right angles to said substantially planar surface, the method including the steps of selecting a strip thickness for division of the wafer into a plurality of strips, selecting a technique for cutting the wafer into the strips at an angle to the substantially planar surface, in which the combined strip thickness and width of wafer removed by the cutting is less than the thickness of the wafer, cutting the wafer into strips using the selected technique and separating the strips from each other.
申请公布号 WO0245143(A1) 申请公布日期 2002.06.06
申请号 WO2001AU01546 申请日期 2001.11.29
申请人 AUSTRALIAN NATIONAL UNIVERSITY;WEBER, KLAUS, JOHANNES;BLAKERS, ANDREW, WILLIAM 发明人 WEBER, KLAUS, JOHANNES;BLAKERS, ANDREW, WILLIAM
分类号 H01L21/306;B23K;B23K101/40;H01L;H01L21/00;H01L21/301;H01L21/46;H01L21/4763;H01L21/50;H01L21/78;H01L31/0236;H01L31/04;H01L31/05;H01L31/052;H01L31/068;H01L31/18 主分类号 H01L21/306
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