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发明名称
LOCALIZED HEATING AND COOLING OF SUBSTRATES
摘要
申请公布号
EP1264333(A2)
申请公布日期
2002.12.11
申请号
EP20010912062
申请日期
2001.03.15
申请人
MATTSON THERMAL PRODUCTS INC.
发明人
TILLMAN, ANDREAS;ZERNICKEL, DIETER;SHOOSHTARIAN, SOHAILA;ACHARYA, NARASIMHA;ELBERT, MIKE
分类号
H01L21/31;H01L21/00;H01L21/26;(IPC1-7):H01L21/00
主分类号
H01L21/31
代理机构
代理人
主权项
地址
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