APPARATUS AND METHOD FOR ANALYZING EXHAUST GAS OF VACUUM TUBE

摘要

PURPOSE: An apparatus and a method for analyzing exhaust gas of a vacuum tube are provided to establish an optimal gas exhaust condition and to measure conductance and throughput of the vacuum tube by analyzing thermal characteristic of exhaust gas. CONSTITUTION: An exhaust gas analyzing apparatus includes a compression head(12) for mounting a vacuum tube(9), a dummy chamber(7) connected to a lower portion of the compression head(12), and the second gate valve(10) which is automatically closed in case of leakage or implosion and installed under the dummy chamber(7). The first main chamber(6') is connected to the second gate valve(10). The second main chamber(6") is connected to the first main chamber(6') through the first orifice(2). The first turbo pump(4) is installed under the second main chamber(6"). The second orifice(3) is connected to the side of the second main chamber(6"). A residual gas analyzer(8) is coupled to the second main chamber(6") through the second orifice(3). An exhaust gas analyzer is installed between the second orifice(3) and the residual gas analyzer(8).