METHOD OF SYNTHESIS OF SILANE

摘要

FIELD: inorganic chemistry, chemical technology. SUBSTANCE: invention relates to technology of preparing semiconductive silicon and to technology of formation of different silicon-containing layers in microelectronics. Process is performed by interaction of silicide with mineral acid. Lithium silicide is used as silicide and interaction is carried out at the room temperature using acetic and hydrochloric acids. EFFECT: increased yield of silane, decreased cost of product. 2 ex