摘要 |
PROBLEM TO BE SOLVED: To normally and stably operate a thermo-electric cooling element and a semiconductor element stored in the inside over a long period of time. SOLUTION: One end side is connected to a lead wire 14 of the thermo-electric cooling element 11 in the neighborhood of the mounting part 1a of a substrate 1, an insulation pedestal 15 joining a metal plate 15b in which the other end side is electrically connected to metalized wiring layer 4a to the upper face through a conductor layer 15a is installed, the upper face of the insulation pedestal 15 is a plane substantially flush with the metalized wiring layer 4a in the other end side of the metal plate 15b and a downward inclination face 15c toward the side of the thermo-electric cooling element 11 in one end side of the metal plate 15b. |