WASHING BATH HAVING APPARATUS FOR MEASURING HORIZONTAL LEVEL OF SEMICONDUCTOR DEVICE WASHING EQUIPMENT

摘要

PURPOSE: A washing bath having an apparatus for measuring the horizontal level of semiconductor device washing equipment is provided to easily and horizontally install the washing bath in the washing equipment, by occasionally inspecting the horizontal level inspecting apparatus installed in the upper portion of the washing bath. CONSTITUTION: A pad(26a) is installed in parallel with the upper surface of the washing bath(22) containing a small quantity of cleaning solution in the upper portion of the washing bath. A tube(28a) of a dome type is formed in the upper portion of the pad, made of a transparent material and containing a small quantity of aqueous solution. Air bubbles of a predetermined size flow in a divided portion of the tube.