发明名称 |
Circuit board and manufacturing method therefor |
摘要 |
A method for manufacturing a circuit board having a through-hole for defining via hole, which has a sloped inner wall tilted at a desired tilt angle theta, is provided. The through-hole has an inverted-trapezoidal cross-section and is made using a photomask having a via hole pattern including a light-shielding pattern corresponding to the bottom of the through-hole, and pluralities of light-shielding strips and translucent strips which are arranged alternately and substantially parallel to one another, the pluralities of light-shielding strips and translucent strips corresponding to the sloped inner wall of the through-hole. The tilt angle theta is determined using a polynomial approximation of degree n: <math-cwu id="MATH-US-00001"> <number>1</number> <math> <mrow> <mrow> <mi>f</mi> <mo></mo> <mrow> <mo>(</mo> <mi>s</mi> <mo>)</mo> </mrow> </mrow> <mo>=</mo> <mrow> <mi>theta</mi> <mo>=</mo> <mrow> <mi>φ</mi> <mo>it</mo> <mrow> <munderover> <mo>∑</mo> <mrow> <mi>k</mi> <mo>=</mo> <mn>0</mn> </mrow> <mi>n</mi> </munderover> <mo>it</mo> <mrow> <msub> <mi>C</mi> <mi>k</mi> </msub> <mo>it</mo> <msup> <mi>s</mi> <mi>k</mi> </msup> </mrow> </mrow> </mrow> </mrow> </mrow> </math> <mathematica-file id="MATHEMATICA-00001" file="US20020179333A1-20021205-M00001.NB"/> <image id="EMI-M00001" wi="216.027" he="24.01245" file="US20020179333A1-20021205-M00001.TIF" imf="TIFF" ti="MF"/> </math-cwu> wherein s is the width of the light-shielding strips and phi is a constant relating to the exposure conditions, and is in the range of about 0.17 rad<theta<about 1.40 rad. |
申请公布号 |
US2002179333(A1) |
申请公布日期 |
2002.12.05 |
申请号 |
US20020127477 |
申请日期 |
2002.04.23 |
申请人 |
MURATA MANUFACTURING CO., LTD. |
发明人 |
SUZUKI MASAYUKI;TOSE MAKOTO;YOSHIDA KOJI;OKAWA TADAYUKI |
分类号 |
G03F1/08;G03F1/00;G03F1/14;G03F1/70;G03F7/20;H01L21/28;H01L21/768;H05K3/00;H05K3/42;H05K3/46;(IPC1-7):H05K1/11 |
主分类号 |
G03F1/08 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|