OBSERVATION DEVICE USING LIGHT AND X−RAY,EXPOSURE SYSTEM AND EXPOSURE METHOD

摘要

An X−ray (5a) beamed onto a substrate (15) serving as a circuit board forms a fluorescent image as an alignment mark of the substrate (15) on a scintillator film (19). A visible ray (21a) shone onto a mask substrate (17) forms a projection image as an alignment mark of the mask substrate (17) on the scintillator film (19). A CCD camera (6) picks up these images.