| 摘要 |
PROBLEM TO BE SOLVED: To selectively detect only hydrogen contained in combustible gas. SOLUTION: The gas sensor is provided with a wire material 1 made of precious metal and a metal oxide semiconductor 2, which is formed so as to cover the wire material 1 and composed of indium oxide as the principal component that selectively oxidizes hydrogen. The crystal system of the indium oxide is rhombohedral, and indium chloride is used as a stating material. The indium chloride is neutralized to PH 7-10 by carbonate of alkaline metal, and then the heat treatment is carried out at 400-700 deg.C. Therefore, a large amount of chlorine compound remains in the indium oxide that is the principal component. As a result, combustible gas other than the hydrogen does not react, and the hydrogen can be selectively detected.
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