发明名称 DEVICE AND METHOD FOR POLISHING PLANAR BODY
摘要 PROBLEM TO BE SOLVED: To provide device and method for polishing a glass plate capable of improving polishing efficiency of the glass plate without adhering and holding the glass plate to a table and uniformly polishing the glass plate. SOLUTION: A polishing surface plate 12 is constituted as a multiple concentric circle surface plate 12 composed of surface plates 26, 28 and 30. Rotating directions of the surface plates 26, 28 and 30 are set to prescribed directions. Peripheral speed in which the total amount of vector of X-direction and Y- direction of rotational force working on the glass plate G from the multiple concentric circle surface plate 12 approaches zero is set for every surface plate 26, 28 and 30.
申请公布号 JP2002346917(A) 申请公布日期 2002.12.04
申请号 JP20010160914 申请日期 2001.05.29
申请人 ASAHI GLASS CO LTD 发明人 WATANABE ITSURO
分类号 G02F1/1333;B24B7/24;B24B37/005;B24B37/12;B24B37/30;B24B41/047;B24B41/06 主分类号 G02F1/1333
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