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发明名称
Process for forming a low ohmic contact between a metallic layer and a semiconductor material
摘要
申请公布号
EP0704894(B1)
申请公布日期
2002.12.04
申请号
EP19950114958
申请日期
1995.09.22
申请人
INFINEON TECHNOLOGIES AG
发明人
WERNER, WOLFGANG, DR.;WIESINGER, KLAUS, DR.;PREUSSGER, ANDREAS, DR.
分类号
H01L21/28;H01L21/285;(IPC1-7):H01L21/768
主分类号
H01L21/28
代理机构
代理人
主权项
地址
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