| 摘要 |
PURPOSE: A wafer cassette is provided to prevent a breakage of a wafer due to a drop of the wafer by using a bar having a plurality of protrusion parts. CONSTITUTION: The wafer cassette(30) comprises a frame(20) and a plurality of plates(22) inserted and fixed in the frame(20) for defining slots. The wafer cassette(30) further includes a bar(28) formed at one end of the plates(22). The bar(28) has a plurality of protrusion parts(29) having same distance to the plates(22). The protrusion parts(29) are inserted into the slots. One end of the bar(28) is connected to a substance having an elastic body, so that the bar(28) is moved to up and down. A spring is used as the elastic body.
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