SEMICONDUCTOR DEVICE MANUFACTURING FACILITY

摘要

PROBLEM TO BE SOLVED: To provide a semiconductor device manufacturing facility which can increase a production content of a unit production line by installing more manufacturing facilities so as to enable a space of each facility to be easily assured to the line of a limited semiconductor device. SOLUTION: The semiconductor device manufacturing facility installed in a semiconductor device production line comprises a robot means Ra installed in a transfer chamber 30a and having a robot arm 18 for selectively fixing a wafer W to drive to extend or contract, to vertically move and to rotate the arm 18, and a process chamber 32a and a load locking chamber 34a selectively coupled to communicate with the chamber 30a and disposed in a height direction.