Polyalkylene oxide prorgens having hyper-branches and low dielectric-constant insulators using them

摘要

The present invention relates to polyalkylene oxide porogens having hyper-branches and low dielectric-constant insulators having nanopores prepared by coating a mixture of the porogen and a high heat-resistant resin such as polysilsesquioxane and thermal treating the coated substrate at a temperature effective to degrade the porogen.