| 摘要 |
PROBLEM TO BE SOLVED: To reduce process-step counts and to simplify the apparatus by enabling precise removal at an atomic or molecular level, without generating affected layer by realizing a process using an optical catalyzer. SOLUTION: This method is constituted, by arranging an optical catalyzer film 20 in the vicinity of a surface of a work 10 in an electrolytic solution 14, irradiating the optical catalyzer film 20 with a light 26 having quantum energy that is greater than the band gap of the optical catalyzer, making reactive radicals from the electrolytic solution 14 generated at the surface of the optical catalyzer, making a chemical reaction between the reactive radicals and the work 10, and removing parts as reaction products.
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