| 发明名称 |
MULTI-SPECTRAL UNIFORM LIGHT SOURCE |
| 摘要 |
A multi-spectral uniform light source (110) provides a single light source for a variety of applications. The gas or gases inside the light source (110) may be exchanged for another gas or gases depending on the desired application and need for a particular wavelength of emitted light. |
| 申请公布号 |
WO02078049(A3) |
申请公布日期 |
2002.11.21 |
| 申请号 |
WO2002US07458 |
申请日期 |
2002.03.12 |
| 申请人 |
WAFERMASTERS, INC. |
发明人 |
YOO, WOO SIK |
| 分类号 |
G03F7/20;H01J9/395;H01J61/00;H01J61/12;H01J61/16;H01J61/28;H01J61/32;H01J61/38 |
主分类号 |
G03F7/20 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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