METHOD FOR PRODUCING LABEL SHEET WITH CLEANING FUNCTION

摘要

PROBLEM TO BE SOLVED: To provide a method for producing a label sheet with a cleaning function of a substrate treating device which is apt to be damaged by a foreign matter such as a manufacturing device and an inspecting device for semiconductor, flat panel display and printed circuit board, etc. SOLUTION: This method for producing a label sheet with a cleaning function features that the transfer of the foreign matter of >=0.2μm from a cleaning layer of the gained label sheet to a silicone wafer is <=20 pieces/in<2> .